SOLUTIONS

According to the definition of SEMI F21-1102, Airborne Molecular Contamination (AMC) in clean room is divided into: Acids, Bases, Condensable Organic Compounds and Trace Metals ) Four categories. Atlas Technology is committed to the development of AMC monitoring technology. According to the process environment and material requirements, we have developed "On-line full-time AMC monitoring system" for different solutions and applications.